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1

Reduction of surface roughness of a silicon chip for advanced nanocalorimetry

Luigi La Spina, Denis Ovchinnikov, Wim H.A. Wien, Alexander W. van Herwaarden, Egbert J.G. Goudena, Joachim Loos, Lis K. Nanver

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 1.22 MB

english, 2008

2

Ultra-high aspect-ratio FinFET technology

Vladimir Jovanović, Tomislav Suligoj, Mirko Poljak, Yann Civale, Lis K. Nanver

Journal:

Solid-State Electronics

Year:

2010

Language:

english

File:

PDF, 974 KB

english, 2010

3

[IEEE 2009 Proceedings of the European Solid State Device Research Conference (ESSDERC) - Athens, Greece (2009.09.14-2009.09.18)] 2009 Proceedings of the European Solid State Device Research Conference - Bulk-Si FinFET technology for ultra-high aspect-ratio devices

Jovanovic, Vladimir, Nanver, Lis K., Suligoj, Tomislav, Poljak, Mirko

Year:

2009

Language:

english

File:

PDF, 1.43 MB

english, 2009

4

[IEEE 2008 16th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Las Vegas, NV, USA (2008.09.30-2008.10.3)] 2008 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - Ultrashallow doping by excimer laser drive-in of RPCVD surface deposited arsenic monolayers

Popadic, Milos, Nanver, Lis K., Biasotto, Cleber, Gonda, Viktor, van der Cingel, Johan

Year:

2008

Language:

english

File:

PDF, 2.46 MB

english, 2008

5

Stability Characterization of High-Sensitivity Silicon-Based EUV Photodiodes in a Detrimental Environment

Shi, Lei, Nihtianov, Stoyan, Nanver, Lis K., Scholze, Frank

Journal:

IEEE Sensors Journal

Year:

2013

Language:

english

File:

PDF, 1.02 MB

english, 2013

6

[IEEE 2009 Proceedings of the European Solid State Device Research Conference (ESSDERC) - Athens, Greece (2009.09.14-2009.09.18)] 2009 Proceedings of the European Solid State Device Research Conference - C-V profiling of ultrashallow junctions using a step-like background doping profile

Popadic, Milos, Xu, Cuiqin, Sarubbi, Francesco, Nanver, Lis K.

Year:

2009

Language:

english

File:

PDF, 1004 KB

english, 2009

7

Bulk-Micromachined Test Structure for Fast and Reliable Determination of the Lateral Thermal Conductivity of Thin Films

La Spina, Luigi, van Herwaarden, Alexander W., Schellevis, Hugo, Wien, Wim H. A., Nenadovic, Neboja, Nanver, Lis K.

Journal:

Journal of Microelectromechanical Systems

Year:

2007

Language:

english

File:

PDF, 801 KB

english, 2007

8

[IEEE 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Cannizzaro, Catania, Italy (2007.10.2-2007.10.5)] 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Ultra-Shallow Dopant Diffusion from Pre-Deposited RPCVD Monolayers of Arsenic and Phosphorus

Popadic, Milos, Nanver, Lis K., Scholtes, T.L.M.

Year:

2007

Language:

english

File:

PDF, 2.24 MB

english, 2007

9

Silicon-Based Technology for Integrated Waveguides and mm-Wave Systems

Jovanovic, Vladimir, Gentile, Gennaro, Dekker, Ronald, de Graaf, Pascal, de Vreede, Leo C. N., Nanver, Lis K., Spirito, Marco

Journal:

IEEE Transactions on Electron Devices

Year:

2015

Language:

english

File:

PDF, 5.02 MB

english, 2015

10

Restricted-Access Al-Mediated Material Transport in Al Contacting of PureGaB Ge-on-Sip+nDiodes

Sammak, Amir, Qi, Lin, Nanver, Lis K.

Journal:

Journal of Electronic Materials

Year:

2015

Language:

english

File:

PDF, 1.24 MB

english, 2015

11

Nanometer-Thin Pure Boron Layers as Mask for Silicon Micromachining

Liu, Xingyu, Nanver, Lis K., Scholtes, Tom L. M.

Journal:

Journal of Microelectromechanical Systems

Year:

2017

Language:

english

File:

PDF, 2.47 MB

english, 2017

12

Influence of layout design and on-wafer heatspreaders on the thermal behavior of fully-isolated bipolar transistors: Part I – Static analysis

Salvatore Russo, Luigi La Spina, Vincenzo d’Alessandro, Niccolò Rinaldi, Lis K. Nanver

Journal:

Solid-State Electronics

Year:

2010

Language:

english

File:

PDF, 680 KB

english, 2010

13

Influence of layout design and on-wafer heatspreaders on the thermal behavior of fully-isolated bipolar transistors: Part II – Dynamic analysis

Salvatore Russo, Luigi La Spina, Vincenzo d’Alessandro, Niccolò Rinaldi, Lis K. Nanver

Journal:

Solid-State Electronics

Year:

2010

Language:

english

File:

PDF, 720 KB

english, 2010

14

C–V profiling of ultra-shallow junctions using step-like background profiles

Miloš Popadić, Vladimir Milovanović, Cuiqin Xu, Francesco Sarubbi, Lis K. Nanver

Journal:

Solid-State Electronics

Year:

2010

Language:

english

File:

PDF, 484 KB

english, 2010

15

On the Mechanisms Governing Aluminum-Mediated Solid-Phase Epitaxy of Silicon

Yann Civale, Guglielmo Vastola, Lis K. Nanver, Rani Mary-Joy, Jae-Ryoung Kim

Journal:

Journal of Electronic Materials

Year:

2009

Language:

english

File:

PDF, 600 KB

english, 2009

16

Chemical Vapor Deposition ofα-Boron Layers on Silicon for Controlled Nanometer-Deepp+nJunction Formation

Francesco Sarubbi, Tom L. M. Scholtes, Lis K. Nanver

Journal:

Journal of Electronic Materials

Year:

2010

Language:

english

File:

PDF, 571 KB

english, 2010

17

Low-Complexity Full-Melt Laser-Anneal Process for Fabrication of Low-Leakage Implanted Ultrashallow Junctions

Cleber Biasotto, Viktor Gonda, Lis K. Nanver, Tom L.M. Scholtes, Johan van der Cingel, Daniel Vidal, Vladimir Jovanović

Journal:

Journal of Electronic Materials

Year:

2011

Language:

english

File:

PDF, 2.01 MB

english, 2011

18

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - CVD Delta-Doped Boron Surface Layers for Ultra-Shallow Junction Formation

Sarubbi, Francesco, Nanver, Lis K., Scholtes, Tom L.

Year:

2006

Language:

english

File:

PDF, 361 KB

english, 2006

19

Boron-layer silicon photodiodes for high-efficiency low-energy electron detection

Agata Šakić, Lis K. Nanver, Tom L.M. Scholtes, Carel Th.H. Heerkens, Tihomir Knežević, Gerard van Veen, Kees Kooijman, Patrick Vogelsang

Journal:

Solid-State Electronics

Year:

2011

Language:

english

File:

PDF, 1.23 MB

english, 2011

20

PureGaB p+n Ge diodes grown in large windows to Si with a sub-300 nm transition region

Amir Sammak, Lin Qi, Wiebe B. de Boer, Lis K. Nanver

Journal:

Solid-State Electronics

Year:

2012

Language:

english

File:

PDF, 1.05 MB

english, 2012

21

SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Baltimore, Maryland (Monday 23 April 2012)] Advanced Photon Counting Techniques VI - A Ge-on-Si single-photon avalanche diode operating in Geiger mode at infrared wavelengths

Aminian, Mahdi, Sammak, Amir, Qi, Lin, Nanver, Lis K., Charbon, Edoardo

Year:

2012

Language:

english

File:

PDF, 1.32 MB

english, 2012

22

[IEEE 2008 IEEE Instrumentation and Measurement Technology Conference - I2MTC 2008 - Victoria, BC, Canada (2008.05.12-2008.05.15)] 2008 IEEE Instrumentation and Measurement Technology Conference - Response Time of Silicon Photodiodes for DUV/EUV Radiation

Xia, Sha, Sarubi, Francesco, Naulaerts, Rik, Nihtianov, Stoyan, Nanver, Lis

Year:

2008

Language:

english

File:

PDF, 716 KB

english, 2008

23

High-Efficiency Silicon Photodiode Detector for Sub-keV Electron Microscopy

Sakic, Agata, van Veen, Gerard, Kooijman, Kees, Vogelsang, Patrick, Scholtes, Tom L. M., de Boer, Wiebe B., Derakhshandeh, Jaber, Wien, Wim H. A., Milosavljevic, Silvana, Nanver, Lis K.

Journal:

IEEE Transactions on Electron Devices

Year:

2012

Language:

english

File:

PDF, 1.17 MB

english, 2012

24

Silicon-Filled Rectangular Waveguides and Frequency Scanning Antennas for mm-Wave Integrated Systems

Gentile, Gennaro, Jovanovic, Vladimir, Pelk, Marco J., Jiang, Lai, Dekker, Ronald, de Graaf, P., Rejaei, Behzad, de Vreede, Leo C. N., Nanver, Lis K., Spirito, Marco

Journal:

IEEE Transactions on Antennas and Propagation

Year:

2013

Language:

english

File:

PDF, 1.51 MB

english, 2013

25

Aluminum-induced iso-epitaxy of silicon for low-temperature fabrication of centimeter-large p+n junctions

Sakic, Agata, Qi, Lin, Scholtes, Tom L.M., van der Cingel, Johan, Nanver, Lis K.

Journal:

Solid-State Electronics

Year:

2013

Language:

english

File:

PDF, 2.62 MB

english, 2013

26

[IEEE 2013 IEEE Sensors - Baltimore, MD, USA (2013.11.3-2013.11.6)] 2013 IEEE SENSORS - UV-sensitive low dark-count PureB single-photon avalanche diode

Qi, Lin, Mok, K. R. C., Charbon, Edoardo, Nanver, Lis. K., Aminian, Mahdi, Charbon, Edoardo

Year:

2013

Language:

english

File:

PDF, 1.15 MB

english, 2013

27

Robust UV/VUV/EUV PureB Photodiode Detector Technology With High CMOS Compatibility

Nanver, Lis K., Lin Qi,, Mohammadi, Vahid, Mok, K. R. M., de Boer, Wiebe B., Golshani, Negin, Sammak, Amir, Scholtes, Thomas L. M., Gottwald, Alexander, Kroth, Udo, Scholze, Frank

Journal:

IEEE Journal of Selected Topics in Quantum Electronics

Year:

2014

Language:

english

File:

PDF, 1.52 MB

english, 2014

28

X-ray Nanodiffraction on a Single SiGe Quantum Dot inside a Functioning Field-Effect Transistor

Hrauda, Nina, Zhang, Jianjun, Wintersberger, Eugen, Etzelstorfer, Tanja, Mandl, Bernhard, Stangl, Julian, Carbone, Dina, Holý, Vaclav, Jovanović, Vladimir, Biasotto, Cleber, Nanver, Lis K., Moers, J

Journal:

Year:

2011

Language:

english

File:

PDF, 3.60 MB

english, 2011

29

[IEEE 2008 26th International Conference on Microelectronics (MIEL 2008) - Nis, Serbia and Montenegro (2008.05.11-2008.05.14)] 2008 26th International Conference on Microelectronics - Analytical carrier transport model for arbitrarily shallow p-n junctions

Popadic, Milos, Lorito, Gianpaolo, Nanver, Lis K.

Year:

2008

Language:

english

File:

PDF, 271 KB

english, 2008

30

[IEEE ESSDERC 2013 - 43rd European Solid State Device Research Conference - Bucharest, Romania (2013.09.16-2013.09.20)] 2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC) - High-ohmic resistors using nanometer-thin pure-boron chemical-vapour-deposited layers

Golshani, Negin, Mohammadi, V., Ramesh, Siva, Nanver, Lis K.

Year:

2013

Language:

english

File:

PDF, 652 KB

english, 2013

31

A Monolithic Low-Distortion Low-Loss Silicon-on-Glass Varactor-Tuned Filter With Optimized Biasing

Buisman, Koen, de Vreede, Leo C. N., Larson, Lawrence E., Spirito, Marco, Akhnoukh, Atef, Lin, Yu, Liu, Xiao-dong, Nanver, Lis K.

Journal:

IEEE Microwave and Wireless Components Letters

Year:

2007

Language:

english

File:

PDF, 278 KB

english, 2007

32

[IEEE 2008 International Workshop on Junction Technology (IWJT) - Shanghai, China (2008.05.15-2008.05.16)] Extended Abstracts - 2008 8th International Workshop on Junction Technology (IWJT '08) - Evaluation of Al-doped SPE ultrashallow P+N junctions for use as PNP SiGe HBT emitters

Civale, Yann, Lorito, Gianpaolo, Cuiqin Xu,, Nanver, Lis K., van der Toorn, Ramses

Year:

2008

Language:

english

File:

PDF, 747 KB

english, 2008

33

[IEEE ESSDERC 2012 - 42nd European Solid State Device Research Conference - Bordeaux, France (2012.09.17-2012.09.21)] 2012 Proceedings of the European Solid-State Device Research Conference (ESSDERC) - Epitaxial growth of large-area p+n diodes at 400 ºC by Aluminum-Induced Crystallization

Sakic, Agata, Qi, Lin, Scholtes, Tom L.M., van der Cingel, Johan, Nanver, Lis K.

Year:

2012

Language:

english

File:

PDF, 2.07 MB

english, 2012

34

[IEEE 2009 67th Annual Device Research Conference (DRC) - University Park, PA, USA (2009.06.22-2009.06.24)] 2009 Device Research Conference - 1.9 nm wide ultra-high aspect-ratio bulk-Si FinFETs

Jovanovic, Vladimir, Poljak, Mirko, Suligoj, Tomislav, Civale, Yann, Nanver, Lis K.

Year:

2009

Language:

english

File:

PDF, 935 KB

english, 2009

35

[IEEE 2008 International Workshop on Junction Technology (IWJT) - Shanghai, China (2008.05.15-2008.05.16)] Extended Abstracts - 2008 8th International Workshop on Junction Technology (IWJT '08) - Extremely ultrashallow junctions for a high-linearity silicon-on-glass RF varactor-diode technology

Nanver, Lis K., Sarubbi, Francesco, Gonda, Viktor, Popadic, Milos, Scholtes, Tom L.M., de Boer, Wiebe, Buisman, Koen

Year:

2008

Language:

english

File:

PDF, 288 KB

english, 2008

36

[IEEE 2011 IEEE International Electron Devices Meeting (IEDM) - Washington, DC, USA (2011.12.5-2011.12.7)] 2011 International Electron Devices Meeting - A CMOS compatible Ge-on-Si APD operating in proportional and Geiger modes at infrared wavelengths

Sammak, Amir, Aminian, Mahdi, Lin Qi,, de Boer, Wiebe B., Charbon, Edoardo, Nanver, Lis K.

Year:

2011

Language:

english

File:

PDF, 848 KB

english, 2011

37

VUV/Low-Energy Electron Si Photodiodes With Postmetal 400$^{\circ}{\rm C}$ PureB Deposition

Mohammadi, Vahid, Qi, Lin, Golshani, Negin, Mok, Caroline K. R., de Boer, Wie Be, Sammak, Amir, Derakhshandeh, Jaber, van der Cingel, Johan, Nanver, Lis K.

Journal:

IEEE Electron Device Letters

Year:

2013

Language:

english

File:

PDF, 1.05 MB

english, 2013

38

[IEEE ESSDERC 2010 - 40th European Solid State Device Research Conference - Sevilla, Spain (2010.09.14-2010.09.16)] 2010 Proceedings of the European Solid State Device Research Conference - Silicon photodiodes for high-efficiency low-energy electron detection

Sakic, Agata, Nanver, Lis K., Scholtes, T. L. M., Heerkens, Carel Th. H., van Veen, Gerard, Kooijman, Kees, Vogelsang, Patrick

Year:

2010

Language:

english

File:

PDF, 416 KB

english, 2010

39

[IEEE 2009 10th International Conference on Ultimate Integration on Silicon (ULIS - Aachen, Germany (2009.03.18-2009.03.20)] 2009 10th International Conference on Ultimate Integration of Silicon - Integration of laser-annealed junctions in a low-temperature high-k metal-gate MISFET

Biasotto, Cleber, Jovanovic, Vladimir, Gonda, Viktor, van der Cingel, Johan, Milosavljevic, Silvana, Nanver, Lis K.

Year:

2009

Language:

english

File:

PDF, 1.39 MB

english, 2009

40

Selective Solid-Phase Silicon Epitaxy of ${\hbox{p}}^{+}$ Aluminum-Doped Contacts for Nanoscale Devices

Civale, Yann, Nanver, Lis K., Schellevis, Hugo

Journal:

IEEE Transactions on Nanotechnology

Year:

2007

Language:

english

File:

PDF, 1.69 MB

english, 2007

41

[IEEE 2013 13th International Workshop on Junction Technology (IWJT) - Kyoto, Japan (2013.06.6-2013.06.7)] 2013 13th International Workshop on Junction Technology (IWJT) - Reverse biasing and breakdown behavior of PureB diodes

Qi, Lin, Mok, K. R. C., Aminian, Mahdi, Scholtes, Tom L. M., Charbon, Edoardo, Nanver, Lis K.

Year:

2013

Language:

english

File:

PDF, 1.39 MB

english, 2013

42

[IEEE ESSDERC 2011 - 41st European Solid State Device Research Conference - Helsinki, Finland (2011.09.12-2011.09.16)] 2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC) - High-quality p+ n Ge diodes selectively grown on Si with a sub-300nm transition region

Sammak, Amir, de Boer, Wiebe D., Qi, Lin, Nanver, Lis K.

Year:

2011

Language:

english

File:

PDF, 749 KB

english, 2011

43

Lateral-Transistor Test Structures for Evaluating the Effectiveness of Surface Doping Techniques

Qi, Lin, Lorito, Gianpaolo, Nanver, Lis K.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2012

Language:

english

File:

PDF, 3.88 MB

english, 2012

44

[IEEE Multi-Physics simulation and Experiments in Microelectronics - Freiburg im Breisgau, Germany (2008.04.20-2008.04.23)] EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems - Aluminum-nitride thin-film heatspreaders integrated in bipolar transistors

La Spina, Luigi, Marano, Ilaria, d'Alessandro, Vincenzo, Schellevis, Hugo, Nanver, Lis K.

Year:

2008

Language:

english

File:

PDF, 1.32 MB

english, 2008

45

[IEEE 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Shanghai, China (2010.11.1-2010.11.4)] 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology - Chemical Vapor Deposition of Ga dopants for fabricating ultrashallow p-n junctions at 400°C

Sammak, Amir, Qi, Lin, de Boer, Wiebe B., Nanver, Lis K.

Year:

2010

Language:

english

File:

PDF, 543 KB

english, 2010

46

[IEEE 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT) - Beijing, China (2008.10.20-2008.10.23)] 2008 9th International Conference on Solid-State and Integrated-Circuit Technology - Ultra-low-temperature process modules for back-wafer-contacted silicon-on-glass RF/microwave technology

Nanver, Lis K., Gonda, Viktor, Civale, Yann, Scholtes, Tom L. M., La Spina, Luigi, Schellevis, Hugo, Lorito, Gianpaolo, Sarubbi, Francesco, Popadic, Milos, Buisman, Koen, Milosavljevic, Silvana, Goude

Year:

2008

Language:

english

File:

PDF, 1.38 MB

english, 2008

47

[IEEE 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Shanghai, China (2006.10.23-2006.10.26)] 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Schottky barrier height modulation by ultra-shallow low-dose dopant diffusion

Popadic, Milos, Nanver, Lis, M. Scholtes, Tom

Year:

2006

Language:

english

File:

PDF, 109 KB

english, 2006

48

[IEEE 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Shanghai, China (2010.11.1-2010.11.4)] 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology - The state-of-the-art of RF capacitive tunable components (Invited)

Huang, Cong, Buisman, Koen, Nanver, Lis K., de Vreede, Leo C. N.

Year:

2010

Language:

english

File:

PDF, 332 KB

english, 2010

49

[IEEE 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Shanghai, China (2006.10.23-2006.10.26)] 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Silicon-on-glass technology for RF and microwave device fabrication

Nanver, Lis, Schellevis, H., Scholtes, T.L.M., Spina, L., Lorito, G., Sarubbi, F., Gonda, V., Popadi, M., Buisman, K., Vreede, L.C.N., Huang, C., Milosavljevic, S., Goudena, E.J.G.

Year:

2006

Language:

english

File:

PDF, 284 KB

english, 2006

50

[ECS 24th Symposium on Microelectronics Technology and Devices - Natal, Brazil (August 31 - September 3, 2009)] ECS Transactions - Laser Annealing of Self-Aligned As

Biasotto, Cleber, Gonda, Viktor, Nanver, Lis K., Van der Cingel, J., Jovanović, V.

Year:

2009

Language:

english

File:

PDF, 489 KB

english, 2009